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Hiroshi Kawata
Hiroshi Kawata
KEK
Extreme ultraviolet lithography
light source
Optics
Physics
Engineering
3
Papers
1
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0
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Stepwise Development to Realize the High Power EUV-FEL Light Source
2020
Ryukou Kato
Hiroshi Sakai
K Tsuchiya
Yasunori Tanimoto
Yosuke Honda
Tsukasa Miyajima
Miho Shimada
Norio Nakamura
Hiroshi Kawata
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Achievement of an important milestone to realize the EUV-FEL high power light source for future lithograph
2020
Ryukou Kato
Hiroshi Sakai
K Tsuchiya
Yasunori Tanimoto
Yosuke Honda
Tsukasa Miyajima
Miho Shimada
Norio Nakamura
Hiroshi Kawata
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Present status of EUV lithography and future prospect on a high power EUV-FEL based on ERL technology
2018
Hiroshi Kawata
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