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Jung Jaesun
Jung Jaesun
Deposition (law)
Substrate (chemistry)
Alkyl
Titanium nitride
Halide
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Tertiary alkyl halides as growth activator and inhibitor for novel atomic layer deposition of low resistive titanium nitride
2021
AIP Advances
Yeon Changbong
Jung Jaesun
Byun Hyeran
Kok Chew Tan
Song Taeho
Kim Sojung
Jinhee Kim
Seok-Jong Lee
Young Soo Park
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