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Melissa A. Smith
Melissa A. Smith
Massachusetts Institute of Technology
Microsystem
Electronic engineering
Fabrication
Photolithography
Optics
2
Papers
7
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A Low-Temperature Nickel Silicide Process for Wafer Bonding and High-Density Interconnects
2020
IEEE Transactions on Components, Packaging and Manufacturing Technology
Melissa A. Smith
Eric Holihan
Bradley P. Duncan
James C. McRae
Paul Miller
Corey Stull
Gianni Pinelli
Donna Ruth-Yost
Livia Racz
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Citations (1)
Design, simulation, and fabrication of three-dimensional microsystem components using grayscale photolithography
2019
Journal of Micro-nanolithography Mems and Moems
Melissa A. Smith
Shaun Berry
Lalitha Parameswaran
Christopher Holtsberg
Noah Siegel
Ronald Lockwood
Michael P. Chrisp
Daniel Z. Freeman
Mordechai Rothschild
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