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Yu.B. Kirykhin
Yu.B. Kirykhin
Chemistry
Optoelectronics
Optics
Semiconductor device fabrication
Lithography
2
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3
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0
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Discharge produced plasma source for EUV lithography
2007
V. M. Borisov
A. Eltzov
Alexander S. Ivanov
O B Khristoforov
Yu.B. Kirykhin
Aleksandr Yu. Vinokhodov
V. A. Vodchits
V. Mishhenko
Alexander V. Prokofiev
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Citations (3)
HIGH POWER EXCIMER LASERS FOR INDUSTRIAL APPLICATIONS
1991
Journal De Physique Iv
V. M. Borisov
O B Khristoforov
Yu.B. Kirykhin
S. G. Kuznetsov
Yu Yu Stepanov
A. Yu. Vinokhodov
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