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E Haimi
E Haimi
Microelectromechanical systems
Manufacturing engineering
Wafer dicing
Chip
Electron beam-induced current
2
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Characterization of denuded zones in internally gettered silicon wafers by electron beam induced current measurements
2018
Antti Haarahiltunen
Hele Väinölä
Marko Yli-Koski
R. Ruotsalainen
Eero Saarnilehto
S Kaarlela
E Haimi
J. Sinkkonen
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School of Chemical Technology Degree Programme of Materials Science and Engineering Annina Eklund CHARACTERIZATION OF STEP CUT CHIP DICING PROCESS IN MEMS ELEMENT MANUFACTURING Master’s thesis for the degree of Master of Science in Technology
2015
E Haimi
Fang Tuurnala
Annina Eklund
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