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Ch. Hecquet
Ch. Hecquet
University of Paris-Sud
Optics
Chemistry
Extreme ultraviolet lithography
beam shaping
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Réflectomètre à large spectre EUV pour la métrologie d'optiques
2006
Journal De Physique Iv
Ch. Hecquet
Marc Roulliay
Franck Delmotte
M.F. Ravet-Krill
A. Hardouin
M. Idir
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