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Yuliya Lisunova

École Polytechnique Fédérale de Lausanne

5

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Phase masks for electron microscopy fabricated by thermal scanning probe lithography

2019 Micron
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Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface

2018 Microelectronic Engineering
- Yuliya Lisunova
- Jürgen Brugger
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High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

2017 Microelectronic Engineering
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Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

2017 Scientific Reports
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Molecular phylogeny suggests transfer of Hemidiscus into Actinocyclus (Coscinodiscales, Coscinodiscophyceae)

2017 Diatom Research
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