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T. Yahagi
T. Yahagi
Yamagata University
Microelectromechanical systems
Fin
Fabrication
Optics
Physics
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Fabrication of MEMS mold with inclined micro-multi-fin structure and shape transfer to resin by thermal imprint process
2020
Japanese Journal of Applied Physics
T. Yahagi
H. Murayama
Yoshiyuki Watanabe
Takashi Mineta
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