Measurement Range Extension of an Industrial Tomography and Profilometry Using Comb-less Interferometry

A measurement extension of a 2D single-shot tomography and profilometry is proposed for the industrial applications using a comb-less broadband optical interferometry. The measurement range can be extended and flexibly varied using a spatial phase modulator (SPM) installed in the interferometer, providing a zooming operation in the axial axis. The measurement range can be controlled from 200 µm to 3.5 mm by controlling the diffraction orders of the SPM. Tomogram and surface profile interference 2D image can be simultaneously acquired by a single - shot with an axial resolution of 2.0 µm (for tomography) and 0.6 µm (for profilometry), respectively.