A 120 GHz on-Chip Yagi-Uda Antenna with Backside Etching in 130 nm SiGe BiCMOS Technology

In this paper we present the design and measurements of a 120 GHz 3-element on-chip Yagi-Uda antenna which uses backside etching to improve radiation efficiency. With a peak realized gain of -4 dBi and an S 11 bandwidth of 5 GHz, the proposed antenna is an interesting solution for mm-wave applications that require a sideways radiation.