Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures

Abstract Micro-fabrication in diamond is applicable in a wide set of emerging technologies, exploiting the exceptional characteristics of diamond for application in bio-physics, photonics and radiation detection. Micro ion-beamirradiation and pulsed laserirradiation are complementary techniques, which permit the implementation of complex geometries, by modification and functionalization of surface and/or bulk material, modifying the optical, electrical and mechanical characteristics of the material. In this article we summarize the work done in Florence (Italy), concerning ion beamand pulsed laserbeam micro-fabrication in diamond.