Silicon pore optics for future x-ray telescopes

Lightweight X-ray Wolter optics with a high angular resolutionwill enable the next generation of X-ray telescopesin space. The candidate mission ATHENA ( Advanced Telescopefor High Energy Astrophysics) required a mirror assembly of 1 m 2 effective area (at 1 keV) and an angular resolutionof 10 arcsec or better. These specifications can only be achieved with a novel technology like Silicon Pore Optics, which is being developed by ESA together with a consortium of European industry. Silicon Pore Optics are made of commercial Si wafers using process technology adapted from the semiconductor industry. We present the recent upgrades made to the manufacturing processes and equipment, ranging from the manufacture of single mirror plates towards complete focusing mirror modules mounted in flight configuration, and results from first vibration tests. The performance of the mirror modules is tested at X-ray facilities that were recently extended to measure optics at a focal distance up to 20 m.