Composite Micro-Machining Technology on the Non-Silicon MEMS

Diversified non-silicon-based micro/nano-fabrication technology (NSMFT/NSNFT), including a variety of high-performance materials, fabrication technologies, device design and test schemes, and microelectromechanical systems (MEMS) devices, is promising in broadening the versatile applications, enhancing the performance, and reducing the process difficulty of MEMS. Therefore, NSMFT/NSNFT has spread widely and attracted worldwide attention. Moreover, NSMFT/NSNFT breaks through the limitation of the single silicon substrate on the design and fabrication of MEMS device. By introducing the diversified non-silicon materials into MEMS, the performance and application of the MEMS system are greatly enhanced and broadened. This review systematically presents the recent fabrication technology and non-silicon materials of NSMFT/NSNFT. Alongside, the design and fabrication of some representative non-silicon-based MEMS devices based on NSMFT/NSNFT are overviewed, and the related performance test systems are also discussed in detail.