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Microspectroscopic measurement and EDX analysis of NbO film with membrane structure fabricated by dry etching
Microspectroscopic measurement and EDX analysis of NbO film with membrane structure fabricated by dry etching
2021
Mina Sato
Akihiro Matsutani
Ryo Tsukui
Masaru Kino
Kodai Yamamoto
Mikio Kurita
Tetsuya Nagata
Keywords:
Materials science
Membrane
Natural bond orbital
Membrane structure
Chemical engineering
Dry etching
Correction
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