Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology

An in-tool, on-wafer detectors’ array for monitoring deep ultraviolet (DUV) light is proposed and demonstrated in this work. The proposed electronic layer detectors array (ELDA) features FinFET CMOS compatibility and compact pixel structure. Its minimum pixel pitch can reach 0.7 $\mu \text{m}$ , enabling the realization of high spatial resolution array. Most importantly, the sensing results from DUV exposure can be stored in the in-pixel storage node for days without external power supply, providing offline electrical nondestructive measurement and readout.