CMOS-foundry-based blue and violet photonics
2021
We demonstrate a CMOS-foundry-based ${\rm{S}}{{\rm{i}}_3}{{\rm{N}}_4}$ photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and ${\lt}{{1}}\;{\rm{dB/cm}}$ waveguide propagation loss of around 405 nm.
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