CMOS-foundry-based blue and violet photonics

2021
We demonstrate a CMOS-foundry-based ${\rm{S}}{{\rm{i}}_3}{{\rm{N}}_4}$ photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and ${\lt}{{1}}\;{\rm{dB/cm}}$ waveguide propagation loss of around 405 nm.
    • Correction
    • Source
    • Cite
    • Save
    11
    References
    2
    Citations
    NaN
    KQI
    []
    Baidu
    map