Transmission electron microscopy
2014
PROBLEM TO BE SOLVED: To provide a transmission electron microscope that can reduce the effect of leak magnetic field.SOLUTION: A transmission electron microscope 100 has an electron beam source 2 for generating an electron beam, an irradiation lens system 4 for irradiating a sample with an electron beam from the electron beam source 2, a sample stage 6 for holding a sample S, a first object lens 8 having upper and lower poles which are arranged so as to sandwich the sample S therebetween to generate magnetic field from the upper and lower poles, a second object lens 10 disposed at a rear stage of the first object lens 8, an imaging lens system 16 disposed at a rear stage of the second object lens 10, and a controller 22 for controlling the first object lens 8 and the second object lens 10. The controller 22 controls the second object lens to perform processing of imaging a transmission electron microscope image of the sample S with an electron beam transmitted through the sample S, and controls the first object lens 8 to perform processing of generating magnetic field which offsets leak magnetic field at a sample position at which the sample S is disposed.
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