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Oxygen plasma etching of hydrocarbon‐like polymers: Part I Modeling
Oxygen plasma etching of hydrocarbon‐like polymers: Part I Modeling
2018
Alexandre Bès
Min Koo
Thành L. Phan
Ana Lacoste
Jacques Pelletier
Keywords:
Materials science
Chemical engineering
Analytical chemistry
Oxygen
Polymer
Etching
Hydrocarbon
Plasma etching
oxygen plasma
oxygen plasma etching
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