A 10 ps Time-Resolution CMOS Image Sensor With Two-Tap True-CDS Lock-In Pixels for Fluorescence Lifetime Imaging

A CMOS lock-in pixel image sensorwith embedded storage diodes and lateral electric field modulation (LEFM) of photo-generated charge is developed for fluorescence lifetime imaging. The time-resolved CMOS image sensor(CIS) with two-tap lock-in pixels achieves a very high time resolution of 10 ps when images are averaged over 30 frames, a very short intrinsic response time of 180 ps at 374 nm, and a low temporal random noise of $1.75{\text{ e}}^{-}_{\ text{rms}}$ with true correlated double sampling(CDS) operation. In addition, by using the LEFM and optimized process, a very high extinction ratioof approximately 94% at 472 nm laser diode is achieved. The usefulness of the proposed CIS is demonstrated for fluorescence lifetime imaging with the simulation and measurement results.