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Structure of AlN films deposited by magnetron sputtering method
Structure of AlN films deposited by magnetron sputtering method
2015
Katarzyna Nowakowska-Langier
Rafal Chodun
Krzysztof Zdunek
R. Minikayev
R. Nietubyć
Keywords:
High-power impulse magnetron sputtering
Materials science
Sputter deposition
Composite material
Inorganic chemistry
Crystal structure
Nanomaterials
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