WO3 thin film based multiple sensor array for electronic nose application

Multiple sensor arraycomprising 16 x 2 sensing elements were realized using RF sputtered WO3 thin films. The sensor films were modified with a thin layer of sensitizers namely Au, Ni, Cu, Al, Pd, Ti, Pt. The resulting sensor arraywere tested for their response towards different gases namely H2S, NH3, NO and C2H5OH. The sensor response values measured from the response curves indicates that the sensor arraygenerates a unique signature pattern ( bar chart) for the gases. The sensor response values can be used to get both qualitative and quantitative information about the gas.