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Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses
Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses
2018
Igor Milov
Igor Alexandrovich Makhotkin
Ryszard Sobierajski
Nikita Medvedev
Vladimir Lipp
Beata Ziaja
Viktor Khokhlov
Vasily Zhakhovsky
Yu. V. Petrov
V. V. Shepelev
D. K. Ilnitsky
K. P. Migdal
Nail Inogamov
Viacheslav Medvedev
Eric Louis
F. Bijkerk
Keywords:
Materials science
Optoelectronics
Thin film
Extreme ultraviolet lithography
single shot
Correction
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