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Optimizing the deposition rate and ionized flux fraction of a high power impulse magnetron sputtering discharge
Optimizing the deposition rate and ionized flux fraction of a high power impulse magnetron sputtering discharge
2021
Martin Rudolph
Nils Brenning
Hamidreza Hajihoseini
Michael A. Raadu
Tiberiu Minea
André Anders
Jon Tomas Gudmundsson
Daniel Lundin
Keywords:
Ionization
Impulse (physics)
deposition rate
Power (physics)
Atomic physics
Fraction (chemistry)
Materials science
Flux
Sputter deposition
Correction
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