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Studies on the effects of ambient gas species on the MOVPE of BGaN thin films
Studies on the effects of ambient gas species on the MOVPE of BGaN thin films
2016
Takumi Nakamura
Yudai Yano
Kohei Ueyama
Toru Aoki
Yoku Inoue
Kazunobu Kojima
Sigefusa chichibu
Takayuki Nakano
Keywords:
Metalorganic vapour phase epitaxy
Thin film
Inorganic chemistry
Materials science
Optoelectronics
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