Design and optimization of surface profilometer based on coplanar guide rail

In order to implement the sub-micron precision measurement, a surface profilometer which based on the coplanar guide rail is designed. This profilometer adopts the open type air floating load and is driven by the magnetic force. As to achieve sub-micron accuracy, the flatness of granite guide working face and aerodynamic block are both processed to the micron level based on the homogenization of air flotation film theory. Permanent magnet which could reduce the influence of the driving disturbance to the measurement accuracy is used as the driving part. In this paper, the bearing capacity and the air floating stiffness of air floating block are both simulated and analyzed as to optimize the design parameters firstly. The layout and magnetic force of the magnet are also simulated. According to the simulation results, type selection and the position arrangement of the magnets are then confirmed. The test results on the experimental platform show that the surface profilometer based on coplanar guide rail possess the basis for realizing the submicron precision measurement.