LTCC-based ceramic microsystems with integrated fluidic elements and sensors

In this contribution the design and fabrication of ceramic microsystems with integrated different microfluidic elements and sensors will be presented. Ceramic microsystems are based on unconventional application of low-temperature co-fired ceramic technology and materials. This unconventional application is related to three-dimensional ceramic structures, such as cantilevers, ledges, bridges, diaphragms, valleys, channels, holes and cavities, valves, mixers, diffusors, distributors, collectors, flow limiters, sensors, and actuators.