Large-aperture phase-shifting interferometer for PSD measurements

In modern high power laser, reflected and transmitted wavefronts of optical components are being specified by the power spectral density function (PSD). In order to ensure accurate measurements of PSD of optical components, the test systems must be calibrated. This paper presents the results of the components wavefront measurements using large aperture laser Fizeau phase shifting interferometer. This paper also describes the testing results of optical components in size from approximately 100 mm X 100 mm to 240 mm X 480 mm, substrate including UBK7 glass, KDP crystal, Nd-glass. These measurements are performed after polishing, after coating and in Brewster. Using these data, we can qualify optical components and improve our fabrication processes under optics development program.