Development of New Inkjet Head Applying MEMS Technology and Thin Film Actuator

We developed a new inkjet head by applying MEMS technology and thin film piezo actuator. Jetting properties of ink jet heads were calculated by the simulation method of the equivalent circuit model generated from actuator properties and ink flow channels of the inkjet head. We manufactured a test piece to investigate the jetting properties and oscillation forms of the actuator. As a result, our test piece was driven at maximum 70 kHz and ejected 3 pl droplet with an ink which viscosity was 10 mPa∙s. We found that the experimented jetting properties and vibration forms agreed very well with the simulation.