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Modeling of the impurity-induced silicon nanocone growth by low energy helium plasma irradiation
Modeling of the impurity-induced silicon nanocone growth by low energy helium plasma irradiation
2021
Quan Shi
Shin Kajita
Shuyu Dai
Shuangyuan Feng
Noriyasu Ohno
Keywords:
Irradiation
Materials science
Silicon
helium plasma
low energy
Impurity
Atomic physics
Correction
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