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Reduction of pit density and surface roughness in MOVPE growth on OVPE-GaN substrates
Reduction of pit density and surface roughness in MOVPE growth on OVPE-GaN substrates
2021
Shigeyoshi Usami
Masayuki Imanishi
Junichi Takino
Tomoaki Sumi
Yoshio Okayama
Mihoko Maruyama
Masashi Yoshimura
Masahiko Hata
Masashi Isemura
Yusuke Mori
Keywords:
Metalorganic vapour phase epitaxy
Materials science
Surface roughness
Reduction (complexity)
Composite material
Correction
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