Chromatic confocal matrix sensor with actuated pinhole arrays
2015
We present two versions of a
chromatic
confocalmatrix sensor for the snapshot acquisition of three-dimensional objects. The first version contains separate illumination and detection pinhole arrays, while the second version uses a single pinhole array in double pass. The discrete lateral measurement points defined by the illumination and detection pinhole arrays are evaluated in parallel with a hyperspectral detection module. As this approach enables the spectrometric evaluation of all lateral channels, multilayer objects can be analyzed. To increase the lateral resolution the pinhole arrays are moved by
micromechanicalactuators. The paper includes a quantitative evaluation of the
chromatic
confocalmodule and proof-of-principle experiments with the full sensor system.
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