Investigation of the stripe patterns from X-ray reflection optics

X-ray beams reflected from a single layer or multilayer coating are widely used for X-ray tomography, holography, and X-ray phase contrast imaging. However, the observed irregular stripe patterns from either unfocused or defocused beams often cause disturbing artifacts and seriously deteriorate the image quality. In this work, we investigate the origin of these irregular fine structures using the wave optics theory. The connection to similar results obtained by the geometric optics theory is also presented. The proposed relation between the second derivative of the wavefront and the irregular structures was then verified by conducting at-wavelength metrology with the speckle-based wavefront sensing technique. This work will not only help to understand the formation of these irregular structures but also provide the basis for manufacturing future ‘stripe-free’ refection optics.