Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices

2021
Although widely applied as contacts to nanoelectronic devices, metal silicides in nanostructures suffer from varying compositions and growth rates. To study the underlying kinetics and to control t...
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    31
    References
    0
    Citations
    NaN
    KQI
    []
    Baidu
    map