H2Ssensing properties of RF sputtered SnO2films

RF sputtered SnO 2 films were investigated for their response for various toxic gases (CO, NO, NH 3 , H 2 S , CO 2 , Cl 2 ). These films were found to be highly sensitive and selective towards H 2 S . H 2 S gas sensing characteristics of these films have been studied as a function of temperature and concentration. These films were found to show maximum sensitivity (S = 54 for 10 ppm H 2 S ) at a temperature of 150°C. Further, at this temperature, sensor response is found to vary linearly with concentration over a wide range from 500 ppb to 500 ppm.