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Characterization of metal organic chemical vapor deposition films
Characterization of metal organic chemical vapor deposition films
1989
William H. Wright
Patrick Anderson
Pok-Kai K. Liao
A. J. Syllaios
Keywords:
Ion plating
Thin film
Hybrid physical-chemical vapor deposition
Plasma processing
Inorganic chemistry
Plasma-enhanced chemical vapor deposition
Pulsed laser deposition
Deposition (phase transition)
Combustion chemical vapor deposition
Materials science
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