A ring-shaped linear ultrasonic motor based on PSN-PMS-PZT ceramic

Abstract In this work, we propose a novel ring-shaped linear ultrasonic motor operating in either E01,a or E01,b mode (orthogonal mode). The motor is fabricated using a self-made high-performance PSN-PMS-PZT ceramic with the optimal composition, which has a high vibration velocity of 0.86 m/s (rms value) at resonance. The vibration velocity is about twice that of a commercialized hard Pb(Zr,Ti)O3 ceramic. Experimental results show that our proposed motor performs much better linear motion symmetricity in two directions comparing to previously reported linear ultrasonic motors. It exhibits a fast moving speed of 248 mm/s, a relatively large driving force of 2.6 N, and a high positioning precision of 0.2 μm in open-loop control, indicating that the proposed linear motor based on self-made PSN-PMS-PZT ceramic has great potential applications for precise actuations.