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N-type Doping of Ga 2 O 3 by Si, Sn Grown by Sputtering Method
N-type Doping of Ga 2 O 3 by Si, Sn Grown by Sputtering Method
2019
Miki Fujita
Yousuke Inoue
Rinntaro Nagasawa
Yumiko Kamae
Toshiki Makimoto
Keywords:
Analytical chemistry
Gallium oxide
Sputtering
Materials science
Doping
Correction
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