Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films.

We report two new ALD/MLD processes for depositing crystalline metal-organic thin films build from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known MOF-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. We characterized the stability and the ionic conductivity of the unhydrated Li-BDS films to assess their applicability as a thin film solid polymer ion conductor.