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Translating the Borrmann effect into narrow-band EUV transmission windows
Translating the Borrmann effect into narrow-band EUV transmission windows
2015
J.L.P. Barreaux
Igor V. Kozhevnikov
Hubertus M.J. Bastiaens
Robbert Wilhelmus Elisabeth van de Kruijs
Frederik Bijkerk
Klaus J. Boller
Keywords:
Optics
Transmission (mechanics)
Extreme ultraviolet lithography
Physics
narrow band
Correction
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