Vibration characteristic analysis method for the quartz microgyroscope based on the admittance circle

The vibration characteristic analysis method for a quartz microgyroscope based on the admittance circle is reported in this paper. Admittance theory is introduced and the admittance circle principle is analysed to study the vibration characteristics of the quartz microgyroscope. The prototype gyroscope was fabricated by micro-electromechanical systems (MEMS) technology. The admittance and phase diagram of the work mode were obtained by vibration mode test systems. Then the admittance circle of the work mode was drawn, and the parameter identification of the transfer function between the voltage and current was completed to analyse the vibration characteristics. Therefore, the vibration characteristic analysis method based on the admittance circle can be used to build the transfer function of the quartz microgyroscope, which is helpful for the design of a high performance quartz microgyroscope.