A miniaturised, nested-cylindrical electrostatic analyser geometry for dual electron and ion, multi-energy measurements

Abstract The CATS (Cylindrical And Tiny Spectrometer) electrostatic optics geometry features multiple nested cylindrical analysers to simultaneously measure multiple energies of electron and multiple energies of ion in a configuration that is targeted at miniaturisation and MEMS fabrication. In the prototyped model, two configurations of cylindrical analyser were used, featuring terminating side-plates that caused particle trajectories to either converge (C type) or diverge (D type) in the axial direction. Simulations show how these different electrode configurations affect the particle focussing and instrument parameters; C-type providing greater throughputs but D-type providing higher resolving powers. The simulations were additionally used to investigate unexpected plate spacing variations in the as-built model, revealing that the k- factorsare most sensitive to the width of the inter-electrode spacing at its narrowest point.