The mechanism of the formation of selective response of semiconductor gas sensor in mixture of CH4/H2/CO with air

Abstract The results of the selective measurement of gas concentrations in air mixtures with CH 4 /H 2 /CO using single thick film metal oxide gas sensor operating in pulsing heating mode are presented. Possible physical and chemical mechanism of the formation of selective sensor response is discussed. Detection limit of CO detection was demonstrated to be of about 50 ppb.