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Fabrication of tactile display using arrayed SMA thick film actuator with individually connecting diode on Si TSV layer
Fabrication of tactile display using arrayed SMA thick film actuator with individually connecting diode on Si TSV layer
2020
Ryo Saito
Yusuke Kimura
Jiale Xu
Takashi Mineta
Keywords:
Actuator
Diode
tactile display
SMA*
layer
Optoelectronics
Fabrication
Materials science
Correction
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